====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     4.E+04 A   Layer # 1- Density = 6.030E22 atoms/cm3 = 2.702 g/cm3
  Layer # 1- Al = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   266.6E+02 A   Straggling =   316.8E+01 A
 Ion Lateral Range =   267.0E+01 A   Straggling =   335.2E+01 A
 Ion Radial  Range =   417.8E+01 A   Straggling =   209.0E+01 A
====================================================================
 Range Skewne- = -001.0776  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.3167  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Al    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
350010.E-03  0.0000E+00  1.2375E+07
700010.E-03  0.0000E+00  1.3859E+07
105001.E-02  0.0000E+00  1.6301E+07
140001.E-02  0.0000E+00  1.6329E+07
175001.E-02  0.0000E+00  1.6490E+07
210001.E-02  0.0000E+00  1.7327E+07
245001.E-02  0.0000E+00  1.8274E+07
280001.E-02  0.0000E+00  1.6841E+07
315001.E-02  0.0000E+00  1.6666E+07
350001.E-02  0.0000E+00  1.9518E+07
385001.E-02  0.0000E+00  1.6855E+07
420001.E-02  0.0000E+00  1.8117E+07
455001.E-02  0.0000E+00  1.8943E+07
490001.E-02  0.0000E+00  2.1033E+07
525001.E-02  0.0000E+00  2.0099E+07
560001.E-02  0.0000E+00  2.1595E+07
595001.E-02  0.0000E+00  2.1579E+07
630001.E-02  0.0000E+00  2.0880E+07
665001.E-02  0.0000E+00  1.9364E+07
700001.E-02  2.8571E+02  2.0025E+07
735001.E-02  2.8571E+02  2.1910E+07
770001.E-02  0.0000E+00  2.2602E+07
805001.E-02  0.0000E+00  2.3909E+07
840001.E-02  0.0000E+00  2.3925E+07
875001.E-02  0.0000E+00  2.6069E+07
910001.E-02  0.0000E+00  2.6812E+07
945001.E-02  0.0000E+00  2.5907E+07
980001.E-02  0.0000E+00  2.5651E+07
101500.E-01  0.0000E+00  2.6605E+07
105000.E-01  0.0000E+00  2.8274E+07
108500.E-01  0.0000E+00  2.9539E+07
112000.E-01  0.0000E+00  2.9287E+07
115500.E-01  0.0000E+00  3.1993E+07
119000.E-01  2.8571E+02  3.3340E+07
122500.E-01  2.8571E+02  3.0516E+07
126000.E-01  2.8571E+02  3.1907E+07
129500.E-01  0.0000E+00  3.2175E+07
133000.E-01  2.8571E+02  3.2933E+07
136500.E-01  0.0000E+00  3.2295E+07
140000.E-01  0.0000E+00  3.0632E+07
143500.E-01  2.8571E+02  3.5346E+07
147000.E-01  5.7143E+02  3.7207E+07
150500.E-01  0.0000E+00  3.5485E+07
154000.E-01  5.7143E+02  3.9025E+07
157500.E-01  0.0000E+00  3.8585E+07
161000.E-01  2.8571E+02  3.7849E+07
164500.E-01  2.8571E+02  3.9078E+07
168000.E-01  5.7143E+02  4.3522E+07
171500.E-01  5.7143E+02  4.4534E+07
175000.E-01  5.7143E+02  4.7462E+07
178500.E-01  5.7143E+02  4.8904E+07
182000.E-01  1.1429E+03  4.8910E+07
185500.E-01  2.8571E+02  5.1926E+07
189000.E-01  8.5714E+02  5.2313E+07
192500.E-01  8.5714E+02  5.3406E+07
196000.E-01  1.1429E+03  5.7193E+07
199500.E-01  5.7143E+02  5.8450E+07
203000.E-01  1.7143E+03  5.5824E+07
206500.E-01  2.2857E+03  6.3046E+07
210000.E-01  2.2857E+03  6.3441E+07
213500.E-01  2.5714E+03  6.1675E+07
217000.E-01  1.7143E+03  6.4495E+07
220500.E-01  2.8571E+03  6.9113E+07
224000.E-01  2.2857E+03  7.0456E+07
227500.E-01  2.2857E+03  7.2565E+07
231000.E-01  5.7143E+03  7.5504E+07
234500.E-01  3.1429E+03  7.8699E+07
238000.E-01  6.0000E+03  8.0523E+07
241500.E-01  3.1429E+03  8.1876E+07
245000.E-01  6.2857E+03  8.8103E+07
248500.E-01  1.0000E+04  9.3040E+07
252000.E-01  7.1429E+03  9.0935E+07
255500.E-01  1.1714E+04  9.3440E+07
259000.E-01  1.2571E+04  9.0278E+07
262500.E-01  1.3429E+04  8.9523E+07
266000.E-01  1.2857E+04  8.6664E+07
269500.E-01  1.3429E+04  8.4679E+07
273000.E-01  1.3714E+04  8.2130E+07
276500.E-01  1.7143E+04  7.9023E+07
280000.E-01  1.4571E+04  7.5156E+07
283500.E-01  1.4857E+04  6.6624E+07
287000.E-01  1.7143E+04  5.6940E+07
290500.E-01  1.1143E+04  4.8011E+07
294000.E-01  1.3714E+04  4.4355E+07
297500.E-01  1.1143E+04  3.2964E+07
301000.E-01  1.1143E+04  2.6957E+07
304500.E-01  8.0000E+03  1.9607E+07
308000.E-01  5.4286E+03  1.6230E+07
311500.E-01  5.1429E+03  1.0278E+07
315000.E-01  2.8571E+03  7.1243E+06
318500.E-01  2.2857E+03  5.5931E+06
322000.E-01  1.1429E+03  3.5017E+06
325500.E-01  8.5714E+02  2.5689E+06
329000.E-01  8.5714E+02  1.0791E+06
332500.E-01  5.7143E+02  4.3314E+05
336000.E-01  0.0000E+00  0.0000E+00
339500.E-01  0.0000E+00  0.0000E+00
343000.E-01  0.0000E+00  0.0000E+00
346500.E-01  0.0000E+00  0.0000E+00
350000.E-01  0.0000E+00  0.0000E+00
